Application of the Low Vacuum Mode for SEM
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Abstract
Low vacuum mode is a late-model kind of observing pattern for SEM. Its biggest characteristic is direct observation of non-conductive samples. In such a way, either the pseudo image caused by electric charge accumulation on the surface of non-conductive samples was avoided or the conductive coating on the surface of the samples was saved. Moreover, it facilitates testing and analysis of other information of the non-conductive sample. In addition, low vacuum mode is carried out on the samples that are not tight for direct observation, which is no substitute for high vacuum.
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