Daily Maintenance and Common Troubleshooting Methods of ULTRA PLUS Field Emission Scanning Electron Microscope

The daily maintenance and common troubleshooting methods of scanning electron microscope (SEM) were summarized from four aspects including environment condition, optical system, vacuum system and accessory facilities, on the basis of Zeiss ULTRA PLUS field emission scanning electron microscope. The main aim was to solve the daily maintenance and common troubleshooting problems and then reduce the maintenance cost, extend service life.