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    PENG Xiao-gang, CAO Biao. Analysis on Corrosion Cause of Dry Etched Machine Parts[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2015, 51(5): 358-360.
    Citation: PENG Xiao-gang, CAO Biao. Analysis on Corrosion Cause of Dry Etched Machine Parts[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2015, 51(5): 358-360.

    Analysis on Corrosion Cause of Dry Etched Machine Parts

    • Corrosion cause of some parts of a dry etched machine was analyzed by means of macroscopic observation, microscopic examination and simulation test.The results showed that the corrosion was caused by wet atmosphere.And the poor coating quality of some parts reduced to corrosion resistance and accelerated the corrosion of the parts.
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