LU Hui-fen, SONG Qing-jun, CAO Yan-fen, SUN Qiu-xiang. Analysis on Charged Effect in Scanning Electron Microscopy[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2014, 50(1): 46-48.
Citation:
LU Hui-fen, SONG Qing-jun, CAO Yan-fen, SUN Qiu-xiang. Analysis on Charged Effect in Scanning Electron Microscopy[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2014, 50(1): 46-48.
LU Hui-fen, SONG Qing-jun, CAO Yan-fen, SUN Qiu-xiang. Analysis on Charged Effect in Scanning Electron Microscopy[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2014, 50(1): 46-48.
Citation:
LU Hui-fen, SONG Qing-jun, CAO Yan-fen, SUN Qiu-xiang. Analysis on Charged Effect in Scanning Electron Microscopy[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2014, 50(1): 46-48.
Analysis on Charged Effect in Scanning Electron Microscopy
Charged effect is an important influencing factor to get a clear, stereo, high resolution and high quality image by scanning electron microscopy (SEM). The causes and solutions for charged effect on imaging by SEM were analyzed. The methods including coating, acceleration voltage reducing, low vacuum were presented to reduce the charged effect.
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