Rutherford Backscattering Technique for Analysing the Thickness and Composition of Thin Films

The essential principle of Rutherford backscattering (RBS) analysis and the experimental apparatus, samples requests and data processing were presented. For illustration with applications of RBS, several experiments were carried out. The thickness of titanium film on silicon substrate was obtained. The composition of titanium-molybdenum alloy film on molybdenum substrate was determined. And the information of implanted helium ions as the impurity, such as the distribution range and actual dose in the alloy film was also achieved. As the development and application of RBS, three analysis methods including the elastic recoil, high energy non-Rutherford scattering and channeling techniques were discussed.