THE CALIBRATION OF CAPACITANCE-DISPLACEMENT MICROMETER AND THE MEASUMENT OF THE MAGNETOSTRICTION COEFFICIENT OF THIN FILMS
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Graphical Abstract
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Abstract
By using a self-constructed equipment, the DWS type Capacitance-displacement micrometer was calibrated accurately and the error area of Cantilever displacement is lower than 5% in the large measuring range. The magnetostriction coefficient of a cantilever magnetostrictive thin film was measured through Capacitance-displacement method and the results were satisfied.
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