Two Fractal Structural Analysis of Polysiloxane Nanoporous Thin Films by Synchrotron Radiation Small Angle X-ray Scattering

Two series of polysiloxane nanoporous thin films fabricated by spin-coating processes were measured by the method of grazing-incidence small angle X-ray scattering (GISAXS) at the station of Beijing Synchrotron Radiation Facility (BSRF). And their scattering profiles and scattering intensities were obtained in a very small angle rang (αi=0.2°). On the basis of these data the fractal characters of the nanoporous thin films were analyzed, and two types of fractal structures were found in these samples except for A1. Under the aid of field emission scanning electron microscope (FESEM), the scatterings produced by nanopores were further confirmed.