Mass Effect of Particle Energy Dispersive Spectrometer Quantitative Analysis in Scanning Electron Microscope

Morphology and compositions of the second particles in precision alloy were analyzed by scanning electron microscopy (SEM) with energy dispersive spectrometer(EDS), and mass effect of particle EDS quantitative analysis was studied. The results show that the mass effect is obvious during particle EDS quantitative analysis. The different of compositions between the particles and matrix is bigger, the mass effect is more obvious, and influences of accelerating voltage on mass effect are also observed. It was found there is a critical size during particle EDS quantitative analysis, and the mass effect disappears when the particle size is bigger than the critical size. The two dimension size of the particle of the polished surface is different from the actual three dimension size, so the critical size characterized by the mass effect is different from the theoretical critical size. But the variety tendency and the statistics laws that researched by the mass effect of particle EDS quantitative analysis are very obvious.