A High Success Rate Preparation Method for Cross-sectional TEM Specimens of Films

Cross-sectional specimen preparation is a key for thin film microstructure observation using TEM.In this paper,the reasons for low success rate of cross-sectional TEM specimen preparation through ion thinning technology were analyzed and an improved method,which could shelter unilateral ion beam to prevent the observed films from positive bombardment,was proposed.The proposed method not only is simple to operate,but also could improve the specimen preparation success rate.