Determining Thickness, Density and Surface Roughness of ZnO Based Film Using X-ray Reflectometry

X-ray reflectometry was used to test the reflective intensity of single layer ZnO based film prepared by magnetron sputtering on SiO2 glass substrate. The reflection curve was gotten that the reflective intensity changed with grazing incidence angle. The relationships between reflection curve and thickness, density and surface roughness of the ZnO film were discussed. Thickness, density and surface roughness of the film were obtained by fitting XRR curve, which were 55.8 nm, 5.5 g·cm-3 and 1.7 nm, respectively. The fitting thickness was a difference of only 0.4 nm comparing with directly calculated thickness of 56.2 nm using XRR data, and the surface roughness was basically same to the result of AFM test. So XRR can be used to nondestructively, accurately and quickly determine the thickness, density and surface roughness of films.