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    WEN Jun, CHEN Chang-le, PAN Feng. RESEARCH OF STRUCTURAL PROPERTIES OF RE-DOPED ZnO THIN FILMS GROWN BY RF MAGNETRON SPUTTERING[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2008, 44(4): 172-174.
    Citation: WEN Jun, CHEN Chang-le, PAN Feng. RESEARCH OF STRUCTURAL PROPERTIES OF RE-DOPED ZnO THIN FILMS GROWN BY RF MAGNETRON SPUTTERING[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2008, 44(4): 172-174.
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    RESEARCH OF STRUCTURAL PROPERTIES OF RE-DOPED ZnO THIN FILMS GROWN BY RF MAGNETRON SPUTTERING

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    • The ZnO thin film and rare earth (RE=La,Nd) doped ZnO thin films were deposited on Si(111) substrate by RF magnetron sputtering and annealed at 400℃ under air. As analyzed by XRD,ZnO thin films with high c-axis orientation growth was realized,RE-doped ZnO thin films were nano-multi-crystal thin films with free growth. The rough surface morphology of RE-doped ZnO thin films were observed by AFM.
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