Basic Principle and Applications of EELS in Study of Material Science

Electron energy lose spectroscopy (EELS) is a kind of modern analysis technology integrated material elements analysis with elemental imaging. Due to high accuracy and high sensitivity to C, N, O, B and other light elements, EELS is widely used in the material research. Besides, due to the characteristics of being able to reflect the outer electron atom state of elements, EELS can also be used for the atomic valence analysis. The basic principle, component, function and application of EELS in the material research have been introduced. Furthermore, the advantages of EELS technology in the study of materials science have been evaluated compared with other analysis technique.