Elastic Recoil Detection Analysis of Hydrogen and Helium Content in Thin Film

The essential principle and experimental method of elastic recoil detection (ERD) analysis was presented, that the energy spectrum of recoiled light atoms can be obtained by the incidental ion beam and the concentration and depth profile of light elements can be analyzed. Its development and application was also introduced. For illustration with application of ERD, the probe of 8 MeV O3+ ion was used to recoil the hydrogen and helium atoms in titanium thin film. The contents and depth profiles of hydrogen and helium were achieved. The ERD analysis was proposed to have important applications in the research work relating to the behavior of hydrogen and helium in materials.