EFFECT OF PRECURSORS PHASE COMPOSITION ON ITO WITH THE RIETVELD REFINMENT

A series of indium tin oxide (ITO) and their precursor samples with different phase composition were studied by rietveld refinement method. It was found that the phase composition was mainly depended on their precursors′ phase and annealing temperature. When annealing temperature is comparatively low,such as 650 ℃ or less,the higher concentration of In(OH)3 exists in precursor,the higher concentration of cubic phase exists in ITO. Whereas,the higher concentration of InOOH remains in precursor,the higher concentration of hexagonal phase remains in ITO. When annealing temperature is very high,only cubic ITO was obtained.