Fault diagnosis and maintenance control of JSM 6360 scanning electron microscope

JSM 6360 scanning electron microscope combined with energy dispersive spectrometer could better analyze the microstructure and micro-element of the material. The basic control points, daily fault analysis and treatment measures and maintenance innovation points of JSM 6360 scanning electron microscope were introduced. The methods of rapid treatment of common faults such as premature fuse of tungsten filament, non-rotation of x-axis and y-axis motors of electron microscope, easy shedding of z-axis rotating clip spring and damage of heater were analyzed. The results could provide reference for maintenance and repair for researchers of the same type or scanning electron microscope.