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    GUO Shoujie, LI Zhisheng, FA Wenjun. Scientific management and standardized operation of field emission scanning electron microscopy[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2024, 60(1): 20-23. DOI: 10.11973/lhjy-wl202401005
    Citation: GUO Shoujie, LI Zhisheng, FA Wenjun. Scientific management and standardized operation of field emission scanning electron microscopy[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2024, 60(1): 20-23. DOI: 10.11973/lhjy-wl202401005

    Scientific management and standardized operation of field emission scanning electron microscopy

    • Scanning electron microscopy had the advantages of high resolution, stable signal and easy operation. It could observe the microstructure of samples and play an important role in material testing. Scanning electron microscopy was mainly composed of vacuum systems, electronic optical systems, display systems and auxiliary equipment. With the continuous development of technology, scanning electron microscopy became increasingly popular, and most operators lacked systematic training, with varying levels of operation and insufficient understanding of equipment maintenance. Taking the FEI Nova NanoSEM 450 field emission scanning electron microscope as an example, a series of scientific management and standardized operation methods were introduced, in order to provide reference for relevant operators.
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