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    LIU Xiangming, WANG Wei, ZHU Qimao, YUAN Xiaoqian. Application of white light interferometry in waviness index detection[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2022, 58(2): 27-29. DOI: 10.11973/lhjy-wl202202007
    Citation: LIU Xiangming, WANG Wei, ZHU Qimao, YUAN Xiaoqian. Application of white light interferometry in waviness index detection[J]. PHYSICAL TESTING AND CHEMICAL ANALYSIS PART A:PHYSICAL TESTING, 2022, 58(2): 27-29. DOI: 10.11973/lhjy-wl202202007

    Application of white light interferometry in waviness index detection

    • The measurement of waviness index by white light interferometry was discussed. The standard of waviness and the main factors affecting the measurement results of waviness were introduced. The specific method of measuring waviness index by white light interference 3D profiler was expounded. White light interferometry was a non-contact measurement, which broadened the analysis method. The results show that the method could not only obtain the waviness of the material surface, but also obtain the specific three-dimensional contour image.
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