Comparison on Quantification Methods of Line Analysis of Electron Probe Microanalyzer

The quantification method of line analysis of electron probe microanalyzer (EPMA) include database method, standard sample method and two-point method for sample to be tested. The line analysis and quantitative point analysis of electro-deposited Fe-Zn alloy were carried out by electron probe microanalyzer. By comparing the results of line analysis and quantitative point analysis, the reasons for the deviation of quantitative results were analyzed. The results show that the quantitative operation of database method was simple and easy to master, and it was not affected by human factors, the results can be used for reference. The standard sample method was suitable for the major elements, but for the small amount of elements with small atomic number, there will be a large deviation. The matrix effect of the sample to be tested was considered in the two-point method for sample to be tested, and the results of the quantitative analysis were in good agreement with those of the quantitative analysis, so it can be used as the preferred method for the quantification of line analysis.