Difficulties and Solutions of Electron Back Scattered Diffraction Testing by Cold Field Emission Gun SEM

In view of some difficulties and misunderstandings of electron back scattered diffraction (EBSD) testing by cold field emission gun SEM (CFEG-SEM), it was pointed out that the current intensity and stability of CFEG-SEM could meet the characterization requirement of EBSD testing. For the problem of snorkel lens, EBSD test should proceed in low magnification mode preferentially, and magnetic field rectification should be done while in high magnification mode. It was also pointed out that position calibration should be paid attention to while in low magnification mode. Through above solutions, most EBSD tests could be carried out properly.