Abstract: Combined the basic principle of X-ray residual stress measurement on single crystal material, through the necessary theoretical analysis, the monocrystalline stress measurement method has been improved and optimized successfully. Considering the application demand on engineering, the stress measurement procedure for single crystal material was simplified and the scope of application was broadened. Namely, not need to accurately determine the 2θ0 beforehand, only need to change the spatial azimuth angle ψ and φ, the stress components can be calculated via multiple linear regression analysis method. Finally, the typical examples of stress measurement on single crystal material were given. Repeated stress measurement on the same site, the experimental results showed that the measuring error was not more than ±20 MPa, which indicated that having higher measurement precision and reliability.