电容位移测量仪的校准与薄膜的磁致伸缩测量

THE CALIBRATION OF CAPACITANCE-DISPLACEMENT MICROMETER AND THE MEASUMENT OF THE MAGNETOSTRICTION COEFFICIENT OF THIN FILMS

摘要: 自制了一套电容位移测量仪的校准装置，并对DWS型电容位移测量仪进行了校准和标定，使位移测量仪在较宽的量程范围内获得的悬臂梁位移测量值的误差≤5%。通过采用经改进校准和标定的位移测量仪，利用悬臂梁-电容法测定了稀土超磁致伸缩薄膜样品的磁致伸缩系数λ，提高了测量精度。

Abstract: By using a self-constructed equipment, the DWS type Capacitance-displacement micrometer was calibrated accurately and the error area of Cantilever displacement is lower than 5% in the large measuring range. The magnetostriction coefficient of a cantilever magnetostrictive thin film was measured through Capacitance-displacement method and the results were satisfied.