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    电子背散射衍射技术及其在材料分析中的应用

    THE ELECTRON BACK-SCATTER DIFFRACTION TECHNOLOGY AND ITS APPLICATION IN MATERIAL ANALYSIS

    • 摘要: 较详细地阐明了电子背散射衍射技术(EBSD)的基本原理、实验分析方法。通过安装在场发射扫描电子显微镜上的电子背散射衍射系统,可以对块状样品进行材料微区范围内取向与结构的快速分析,使显微组织、微区成分与结晶学数据分析联系起来,电子背散射衍射技术成为现代材料科学研究的重要实验技术。

       

      Abstract: The basic principle and experimental analysis method of the Electron Back-Scatter Diffraction technology was introduced. Through EBSD analyzing systems mounted on Field Scanning Electronic Microscope, it can complete microstructure analysis of crystallographic structures and orientations of block sample, which can interconnect microstructure observation, micro-area chemical analysis and crystallography data analysis, and the EBSD technology become the most important analysis technology in Material Science Research.

       

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