Abstract: Properties of high hardness steel (GCr15) and high purity fused silica were tested by micro-Vickers sclerometer and nanoindentation instrument. The result shown that modulus and hardness of the high hardness steel are respectively 238.140GPa and 9.468GPa. At the same time, modulus and hardness of the fused silicon are respectively 71.386GPa and 9.502GPa. Also the uniformity of these two types of sample was revealed. The uniformity of the high purity fused silica is better than that of the high hardness steel.