X射线多晶衍射试验中FWHM测量的影响因素
Influencing Factors of FWHM Measuring in Polycrystal X-ray Diffraction
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摘要: 简单介绍了X射线多晶衍射中FWHM的定义及应用。单纯从试验技术的角度出发, 使用荷兰Philips公司生产的X′Pert MPD Pro型衍射仪, 以Philips公司提供的标准多晶硅片为试样, 逐一考察了仪器设置、程序设置、试样制备以及试验数据处理等因素对于FWHM测量结果的影响并分析了其中的原因。在此基础上总结出精确测量FWHM的一套试验方法。Abstract: A simple introduction for the concept and application of FWHM in polycrystal X-ray diffraction was given. From experimental technology, the influence of FWHM measuring made by instrument settings, program settings, sample preparation, data processing and so on was researched. The diffractometer was X′Pert MPD Pro made by Philips, the sample was polycrystal silicon sample provided by Philips. A method how to exactly measure the FWHM was summarized.