Abstract: Fused silicon and high-hardness GCr15 steel were tested according to the criterion of ISO 14577-1 Metallic materials-Instrumented indentation test for hardness and materials parameters-Part 1: Test method which issued in 2002. Three equipments which were MTS nanoindenter,HYSI,CSM were used to test some parameters. Repeatability and reproducibility were adopted to show the precision of nanoindentation test result.