Abstract: Based on the side tilt and fix ψ method,the (311) plane of quenched J75 stainless steel was measured by X-ray diffraction. The residual stress and micro-strain effects of J75 stainless steel surface center in different quenching temperatures were determined. The measurement results showed that the compressed residual stress in the sample surface was between -400 MPa and -650 MPa,the maximal value appeared when quenching temperature was about 700℃. The quenching also causeed the increase of FWHM of diffraction peaks from 1.25°to above 1.4°,so a lot of dislocations and other defect developed and according to the instantaneous heat stress distribution,the nearer the surface was,the larger the diffraction line broadening was.