用Rietveld 精修法研究前驱体相组成对铟锡氧化物相组成的影响

EFFECT OF PRECURSORS PHASE COMPOSITION ON ITO WITH THE RIETVELD REFINMENT

摘要: 采用Rietveld全谱拟合方法对一系列相组成不同的铟锡氧化物前驱体在不同温度下热处理后的样品进行定量物相分析。研究结果表明,铟锡氧化物的相组成在很大程度上依赖于前驱体的相组成和煅烧温度。当煅烧温度较低(如<650 ℃)且时间较短(如<2 h)时,前驱体中In(OH)3含量越高,则煅烧后铟锡氧化物(ITO)中立方相的含量越高;反之,前驱体中InOOH含量越高,则煅烧后铟锡氧化物(ITO)中六方相的含量越高。在煅烧温度很高时只能得到立方结构的铟锡氧化物。

Abstract: A series of indium tin oxide (ITO) and their precursor samples with different phase composition were studied by rietveld refinement method. It was found that the phase composition was mainly depended on their precursors′ phase and annealing temperature. When annealing temperature is comparatively low,such as 650 ℃ or less,the higher concentration of In(OH)3 exists in precursor,the higher concentration of cubic phase exists in ITO. Whereas,the higher concentration of InOOH remains in precursor,the higher concentration of hexagonal phase remains in ITO. When annealing temperature is very high,only cubic ITO was obtained.