Abstract: Scanning electron microscopy and X-ray energy spectrometer analysis were important methods for quantitative analysis of elements. The basic working principle of quantitative analysis of X-ray energy spectrometer was briefly described, and discussed the quantitative analysis methods of X-ray energy spectrometer, methods to improve the accuracy of quantitative analysis results, and common problems in quantitative analysis. It provided a certain reference for further improving the accuracy of quantitative analysis of energy spectrometer.