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    工作参数对纸张类不导电试样扫描电镜图像质量的影响

    The influence of working parameters on the quality of scanning electron microscopy images of non-conductive paper samples

    • 摘要: 以纸张为研究对象,在不同加速电压、束流、工作距离、喷镀金属膜时间、工作模式等条件下,对试样进行扫描电镜分析,以研究不同工作参数对纸张试样扫描电镜图像质量的影响。结果表明:选择加速电压为15 kV,束流为100 pA,工作距离为20 mm,可获得受荷电效应影响小、立体感强的纸张形貌;对试样进行适当的喷金处理有利于增强试样的导电性,而采用低真空模式拍摄则可消除荷电效应的影响,降低对测试人员的操作要求。

       

      Abstract: Using paper as the research object, scanning electron microscopy analysis was conducted on the samples under different conditions such as acceleration voltage, beam current, working distance, metal film spraying time, and working mode to investigate the influence of different working parameters on the quality of scanning electron microscopy images of paper samples. The results show that selecting an acceleration voltage of 15 kV, a beam current of 100 pA, and a working distance of 20 mm could obtain a paper morphology image that was less affected by the charge effect and had a strong sense of three dimensionality. Proper gold spraying treatment on the sample was beneficial for increasing its conductivity, while shooting in low vacuum mode could eliminate the influence of charging effect and reduce the operational requirements for testing personnel.

       

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