Abstract: The ion beam polisher could quickly cut samples without stress-strain layers, foreign contaminants, and exposed the true internal structural information of the samples. The Leica EM TIC 3X three ion beam polisher was capable of processing three ion sources simultaneously, and had the advantages of large ion beam width, large area, non focused ion source energy dispersion, and minimal damage to the sample. The daily maintenance content of the instrument has been summarized, and several common problems and their solutions have been listed. The research results could provide reference for instrument users.