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    场发射扫描电镜的科学管理与规范操作

    Scientific management and standardized operation of field emission scanning electron microscopy

    • 摘要: 扫描电镜具有分辨率高、信号稳定、操作简便等优点,可观察试样的微观形貌,在材料测试中起着重要的作用。扫描电镜主要由真空系统、电子光学系统、显示系统以及附属设备等组成。随着科技的不断发展,扫描电镜变得越来越普及,多数操作人员缺乏系统性的培训,操作水平参差不齐,对设备维护方面不够了解。以FEI Nova NanoSEM 450型场发射扫描电镜为例,介绍了该设备的一系列科学管理与规范操作方法,以期为相关操作人员提供参考。

       

      Abstract: Scanning electron microscopy had the advantages of high resolution, stable signal and easy operation. It could observe the microstructure of samples and play an important role in material testing. Scanning electron microscopy was mainly composed of vacuum systems, electronic optical systems, display systems and auxiliary equipment. With the continuous development of technology, scanning electron microscopy became increasingly popular, and most operators lacked systematic training, with varying levels of operation and insufficient understanding of equipment maintenance. Taking the FEI Nova NanoSEM 450 field emission scanning electron microscope as an example, a series of scientific management and standardized operation methods were introduced, in order to provide reference for relevant operators.

       

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