Abstract: The preparation of the sample was the key to the characterization of the transmission electron microscope, and the traditional ion thinning method was inefficient and difficult to meet the needs of large-scale testing. Taking the extreme ultraviolet multilayer film deposited on a single crystal silicon substrate as an example, an ion thinning method for preparing multiple transmission electron microscope cross-section samples at the same time was introduced. The results show that this method not only shortened the time of ion thinning, but also shortened the time of transmission electron microscope loading and vacuuming.