Abstract: The electron probe micro analysis method was used to elemental line analysis quantify for fiber prefabricated rod. Factors such as low content of Yb and Al elements in the core of the fiber prefabricated rod, complex matrix effects and differences in testing conditions led to significant errors in the line analysis quantify results. Correct the line analysis quantify results of Yb and Al elements in the fiber prefabricated rod using the multi-point method test results. The results show that introducing a correction factor on the basis of the two-point method could simplify the testing process, obtain elemental line analysis quantify results quickly and accurately .