Abstract: Guided by the standard JJG 901-1995 and GB/T 15075-1994, according to the verification principle of different sub-items of electron probe microanalyzer, and combined with its software function, the convenient and fast state verification of electron probe microanalyzer was realized. The relatively old processes and indexes in JJG 901-1995 standard and the methods and specifications that need to be updated were discussed. The results could provide reference for operators to master the status of the electron probe microanalyzer, the instrument verification work of the third-party metrology institution and the update work of JJG 901-1995.