Abstract: The effects of shot peening on the surface roughness, residual stress, diffraction half-height width, residue stress and microhardness of 0Cr16Ni5Mo1 martensitic stainless steel were studied by X-ray stress analysis and diffraction analysis. The results show that after composite shot peening process of steel shot-peening+glass/ceramic micro-shot peening, the surface roughness of the sample was low, the residual compressive stress was high and evenly distributed, the depth of residual compressive stress layer was more than 100 μm, the diffraction half height and width, retained austenite content changed obviously, and the surface hardness increased significantly.