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    电子探针线分析定量化方法对比

    Comparison on Quantification Methods of Line Analysis of Electron Probe Microanalyzer

    • 摘要: 电子探针(EPMA)线分析定量化方法包括数据库法、标准样品法、待测样品两点法。利用电子探针对电沉积Fe-Zn合金进行线分析及定量点分析,通过对比线分析定量化与定量点分析的结果,分析了定量化结果产生偏差的原因。结果表明:数据库法定量化操作简单比较容易掌握,且不受人为因素影响,该结果可供参考。标准样品法定量化适用于主量元素,而对于原子序数较小的少量元素则会产生较大偏差。待测样品两点法考虑了待测样品的基体效应,其定量化结果与定量点分析结果吻合度高,可作为线分析定量化的首选方法。

       

      Abstract: The quantification method of line analysis of electron probe microanalyzer (EPMA) include database method, standard sample method and two-point method for sample to be tested. The line analysis and quantitative point analysis of electro-deposited Fe-Zn alloy were carried out by electron probe microanalyzer. By comparing the results of line analysis and quantitative point analysis, the reasons for the deviation of quantitative results were analyzed. The results show that the quantitative operation of database method was simple and easy to master, and it was not affected by human factors, the results can be used for reference. The standard sample method was suitable for the major elements, but for the small amount of elements with small atomic number, there will be a large deviation. The matrix effect of the sample to be tested was considered in the two-point method for sample to be tested, and the results of the quantitative analysis were in good agreement with those of the quantitative analysis, so it can be used as the preferred method for the quantification of line analysis.

       

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