Abstract: When the electron probe microanalysis is used to quantitatively analyze the content of N in Ti containing high entropy alloy by ZAF correction method (atoimc number correction Z, absorption correction A, fluorescence correction F), N element will be uncertain because of the interference of Ti element characteristic X-ray. The interference peak correction factor α was calculated by test of element content in Ti, BN, TiN standard samples, and then the ZAF test results were corrected by using this factor. The results show that the N content in precipitates of Ti containing high entropy alloy could be measured by interference peak correction accurately. This method can be widely used in other samples with interference peaks.