Abstract: G200 micro-nano indentation apparatus was used to measure the mechanical properties of different micro-nano coating materials. The results show that the nano indentation method could be used to detect and characterize the hardness and elastic modulus and the changing trend with the coating thickness of the micro-nano coating materials, so as to understand the mechanical properties of the coating and the bonding quality with the base material. The surface effect was obvious when nano-indentation method was used to measure the mechanical properties of coating materials. It is generally recommended that the compression depth should be no less than 20 μm to ensure that the uncertainty of compression depth caused by surface roughness was less than 5%.